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Thermal response of MOCVD hafnium silicate

Patrick Lysaght; Brendan Foran; Susanne Stemmer; Gennadi Bersuker; Joe Bennett; Robin Tichy; Larry Larson; Howard R Huff

作者Patrick Lysaght; Brendan Foran; Susanne Stemmer; Gennadi Bersuker; Joe Bennett; Robin Tichy; Larry Larson; Howard R Huff
卷第69卷
印刷ISSN0167-9317
文件大小741.27KB
发表时间2003
DOI10.1016/s0167-9317(03)00295-8
页码182-189