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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optomechanics 2003 - <title>Diamond-turning-assisted fabrication of a high-numerical-aperture lens assembly for 157-nm microlithography</title>

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optomechanics 2003 - Diamond-turning-assisted fabrication of a high-numerical-aperture lens assembly for 157-nm microlithography

Arriola, Edmund W.; Hatheway, Alson E.

作者Arriola, Edmund W.; Hatheway, Alson E.
卷第5176卷
印刷ISSN0277-786X
文件大小622.04KB
发表时间2003
DOI10.1117/12.503765
页码36-43

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