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[IEEE Nineteenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium - San Jose, CA, USA (11-13 March 2003)] Ninteenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium, 2003. - Through the substrate, backside thermal measurements on active semiconductor devices using near IR thermoreflectance

[IEEE Nineteenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium - San Jose, CA, USA (11-13 March 2003)] Ninteenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium, 2003. - Through the substrate, backside thermal measurements on active semiconductor devices using near IR thermoreflectance

Christofferson, J.; Shakouri, A.

作者Christofferson, J.; Shakouri, A.
文件大小378.54KB
发表时间2003
DOI10.1109/stherm.2003.1194373
页码271-275

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