SPIE Proceedings [SPIE Quality Control by Artificial Vision - Gatlinburg, United States (Monday 19 May 2003)] Sixth International Conference on Quality Control by Artificial Vision - Patterned wafer segmentation
- 作者Bourgeat, Pierrick T.; Tobin, Jr., Kenneth W.; Meriaudeau, Fabrice; Meriaudeau, Fabrice; Tobin, Jr., Kenneth W.; Gorria, Patrick
- 卷第5132卷
- 印刷ISSN0277-786X
- 文件大小554.88KB
- 发表时间2003
- DOI10.1117/12.514935
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