High Rate Deposition of Mn-Zn Spinel Ferrite Thin Films Using Reactive Facing-Target Sputtering.
- 期刊名称Journal of the Japan Society of Powder and Powder Metallurgy
- 作者Kamiki, Taro; Saito, Syunsuke; Hyun, Kong Sok; Nakagawa, Shigeki
- 卷第50卷
- 期第2期
- 印刷ISSN0532-8799
- 电子ISSN1880-9014
- 文件大小3005.30KB
- 发表时间2003
- DOI10.2497/jjspm.50.143
- 页码143-148
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