Power density effects on the growth of microcrystalline silicon–carbon alloys by PECVD
- 作者U. Coscia; G. Ambrosone; S. Lettieri; P. Maddalena; P. Rava; C. Minarini
- 卷第427卷
- 印刷ISSN0040-6090
- 文件大小161.52KB
- 发表时间2003
- DOI10.1016/s0040-6090(02)01145-8
- 页码284-288
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