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Ion-beam induced defects and nanoscale amorphous clusters in silicon carbide

Ion-beam induced defects and nanoscale amorphous clusters in silicon carbide

W.J Weber; F Gao; R Devanathan; W Jiang; C.M Wang

作者W.J Weber; F Gao; R Devanathan; W Jiang; C.M Wang
卷第216卷
印刷ISSN0168-583X
文件大小577.37KB
发表时间2004
DOI10.1016/j.nimb.2003.11.016
页码25-35

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