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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Three-dimensional nanofabrication (3D-NANO) down to 10-NM order using electron-beam lithography

[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Three-dimensional nanofabrication (3D-NANO) down to 10-NM order using electron-beam lithography

Yamazaki, K.; Namatsu, H.
  • 作者Yamazaki, K.; Namatsu, H.
  • 文件大小337.51KB
  • 发表时间2004
  • DOI10.1109/MEMS.2004.1290658
  • 页码609-612
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