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Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Daisuke Muto; Masao Sakuraba; Takuya Seino; Junichi Murota

作者Daisuke Muto; Masao Sakuraba; Takuya Seino; Junichi Murota
卷第224卷
印刷ISSN0169-4332
文件大小151.25KB
发表时间2004
DOI10.1016/j.apsusc.2003.08.048
页码210-214

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