Improved charge neutralization method for depth profiling of bulk insulators using O2+ primary beam on a magnetic sector SIMS instrument
- 作者A.L. Pivovarov; F.A. Stevie; D.P. Griffis
- 印刷ISSN0169-4332
- 文件大小180.43KB
- 发表时间2004
- DOI10.1016/j.apsusc.2004.03.070
- 页码786-790
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