An Optimal Residency-Aware Scheduling Technique for Cluster Tools With Buffer Module
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Rostami, S.; Hamidzadeh, B.
- 卷第17卷
- 期第1期
- 印刷ISSN0894-6507
- 文件大小243.05KB
- 发表时间2004-02
- DOI10.1109/tsm.2003.822725
- 页码68-73
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