Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors

• 作者M Lemberger; A Paskaleva; S Zürcher; A.J Bauer; L Frey; H Ryssel
• 卷第72卷
• 印刷ISSN0167-9317
• 文件大小388.29KB
• 发表时间2004
• DOI10.1016/j.mee.2004.01.010
• 页码315-320