[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - A Novel MEMS Tunable Capacitor
- 作者Siyuan He, ; Ridha Ben Mrad,
- 文件大小144.39KB
- 发表时间2004
- DOI10.1109/ICMENS.2004.1509025
- 页码618-622
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