Laser thermal processing using an optical coating for ultra shallow junction formation

M. Hernandez; J. Venturini; D. Berard; G. Kerrien; T. Sarnet; D. Débarre; J. Boulmer; C. Laviron; D. Camel; J.-L. Santailler; H. Akhouayri

作者M. Hernandez; J. Venturini; D. Berard; G. Kerrien; T. Sarnet; D. Débarre; J. Boulmer; C. Laviron; D. Camel; J.-L. Santailler; H. Akhouayri
印刷ISSN0921-5107
文件大小276.06KB
发表时间2004
DOI10.1016/j.mseb.2004.07.092
页码105-108

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