Thermal stability and decomposition of the HfO[sub 2]–Al[sub 2]O[sub 3] laminate system
- 期刊名称Applied Physics Letters
- 作者Chang, Hyo Sik; Hwang, Hyunsang; Cho, Mann-Ho; Moon, Dae Won; Doh, Seok Joo; Lee, Jong Ho; Lee, Nae-In
- 卷第84卷
- 期第1期
- 印刷ISSN0003-6951
- 文件大小413.20KB
- 发表时间2004
- DOI10.1063/1.1637955
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