Characteristics of 6H-SiC Bipolar JTE Diodes Realized by Sublimation Epitaxy and Al Implantation
Strel'chuk, Anatoly M.; Lebedev, A.A.; Davydov, D.V.; Savkina, N.S.; Kuznetsov, Alexey N.; Valakh, M.; Kiselev, V.S.; Romanyuk, B.N.; Raynaud, Christophe; Chante, Jean-Pierre; Locatelli, Marie Laure
- 期刊名称Materials Science Forum
- 作者Strel'chuk, Anatoly M.; Lebedev, A.A.; Davydov, D.V.; Savkina, N.S.; Kuznetsov, Alexey N.; Valakh, M.; Kiselev, V.S.; Romanyuk, B.N.; Raynaud, Christophe; Chante, Jean-Pierre; Locatelli, Marie Laure
- 电子ISSN1662-9752
- 文件大小199.62KB
- 发表时间2004
- DOI10.4028/www.scientific.net/MSF.457-460.1133
- 页码1133-1136