Fabrication of 4H-SiC Double-Epitaxial MOSFETs
- 期刊名称Materials Science Forum
- 作者Harada, Shinsuke; Okamoto, Mitsuo; Yatsuo, Tsutomu; Adachi, Kazuhiro; Suzuki, Kenji; Suzuki, Seiji; Fukuda, Kenji; Arai, Kazuo
- 电子ISSN1662-9752
- 文件大小501.78KB
- 发表时间2004
- DOI10.4028/www.scientific.net/MSF.457-460.1421
- 页码1421-1424