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Fast Epitaxial Growth of Thick 4H-SiC with Specular Surface by Chimney-Type Vertical Hot-Wall Chemical Vapor Deposition

Fast Epitaxial Growth of Thick 4H-SiC with Specular Surface by Chimney-Type Vertical Hot-Wall Chemical Vapor Deposition

Fujiwara, H.; Danno, Katsunori; Kimoto, Tsunenobu; Tojo, T.; Matsunami, Hiroyuki

期刊名称Materials Science Forum
作者Fujiwara, H.; Danno, Katsunori; Kimoto, Tsunenobu; Tojo, T.; Matsunami, Hiroyuki
电子ISSN1662-9752
文件大小360.87KB
发表时间2004
DOI10.4028/www.scientific.net/MSF.457-460.205
页码205-208

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