Robust SOI process without footing and its application to ultra high-performance microgyroscopes
- 作者Jongpal Kim; Sangjun Park; Donghun Kwak; Hyoungho Ko; William Carr; James Buss; Dong-il Dan Cho
- 卷第114卷
- 印刷ISSN0924-4247
- 文件大小598.24KB
- 发表时间2004
- DOI10.1016/j.sna.2004.01.022
- 页码236-243
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