Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems
Tianhong Cui; Feng Hua; Yuri Lvov
- 作者Tianhong Cui; Feng Hua; Yuri Lvov
- 卷第114卷
- 印刷ISSN0924-4247
- 文件大小201.20KB
- 发表时间2004
- DOI10.1016/j.sna.2004.01.023
- 页码501-504