Atomically Controlled Technology for Future Si-Based Devices
- 期刊名称Solid State Phenomena
- 作者Murota, Junichi; Sakuraba, Masao; Tillack, Bernd
- 电子ISSN1662-9779
- 文件大小1357.73KB
- 发表时间2004
- DOI10.4028/www.scientific.net/SSP.95-96.607
- 页码607-616
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