Deposition and in-situ characterization of ultra-thin films

• 作者Stanislav Voborný; Miroslav Kolı́bal; Jindřich Mach; Jan Čechal; Petr Bábor; Stanislav Průša; Jiřı́ Spousta; Tomáš Šikola
• 卷第459卷
• 印刷ISSN0040-6090
• 文件大小146.29KB
• 发表时间2004
• DOI10.1016/j.tsf.2003.12.076
• 页码17-22