Semiconductor–metal phase transition of iron disilicide by laser annealing and its application to form device electrodes
Naotaka Otogawa; Shinan Wang; Shusaku Kihara; Zhengxin Liu; Yasuhiro Fukuzawa; Yasuhito Suzuki; Masato Osamura; Teruhisa Ootsuka; Takahiro Mise; Kiyoshi Miyake; Yasuhiko Nakayama; Hisao Tanoue; Yunosuke Makita
- 作者Naotaka Otogawa; Shinan Wang; Shusaku Kihara; Zhengxin Liu; Yasuhiro Fukuzawa; Yasuhito Suzuki; Masato Osamura; Teruhisa Ootsuka; Takahiro Mise; Kiyoshi Miyake; Yasuhiko Nakayama; Hisao Tanoue; Yunosuke Makita
- 卷第461卷
- 期第1期
- 印刷ISSN0040-6090
- 文件大小368.07KB
- 发表时间2004
- DOI10.1016/j.tsf.2004.02.081
- 页码223-226