Homoepitaxial growth and characterization of thick SiC layers with a reduced micropipe density
- 期刊名称MRS Proceedings
- 作者Tsuchida, H.; Kamata, I.; Izumi, S.; Tawara, T.; Jikimoto, T.; Miyanagi, T.; Nakamura, T.; Izumi, K.
- 卷第815卷
- 电子ISSN1946-4274
- 文件大小1933.44KB
- 发表时间2004-1
- DOI10.1557/PROC-815-J2.1
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