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Optical properties of silicon rich silicon oxides obtained by PECVD

Optical properties of silicon rich silicon oxides obtained by PECVD

B. Dı́az; J.A. Rodrı́guez; M. Riera; A. Llobera; C. Domı́nguez; J. Tutor

作者B. Dı́az; J.A. Rodrı́guez; M. Riera; A. Llobera; C. Domı́nguez; J. Tutor
卷第35卷
期第1期
印刷ISSN0026-2692
文件大小96.76KB
发表时间2004
DOI10.1016/s0026-2692(03)00224-6
页码65-67

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