发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Polymer Screening Method for Chemically Amplified Electron Beam and X-Ray Resists

Yamamoto, Hiroki; Nakano, Atsuro; Okamoto, Kazumasa; Kozawa, Takahiro; Tagawa, Seiichi

期刊名称Japanese Journal of Applied Physics
作者Yamamoto, Hiroki; Nakano, Atsuro; Okamoto, Kazumasa; Kozawa, Takahiro; Tagawa, Seiichi
卷第43卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小520.24KB
发表时间2004-6-29
DOI10.1143/JJAP.43.3971
页码3971-3973