Book reviews
- 期刊名称Film International
- 作者Eckstein, Arthur M; Deutsch, James; Arnman, Anna; Herbert, Daniel; Niskanen, Eija; Wilson, Ronald W; Hedling, Olof; Jaffe, Ira; Buhle, Paul; Smith-Rowsey, Daniel; Polan, Dana; Smith-Rowsey, Daniel; Niskanen, Eija; Wilson, Ronald W
- 卷第2卷
- 期第1期
- 印刷ISSN1651-6826
- 文件大小871.11KB
- 发表时间2004-01
- DOI10.1386/fiin.2.1.44
- 页码44-63
Science not yet without bordersSeligson, Joel; Friedman, Victor J. · Physics Today · 2008
Buried diffraction gratings: a phenomenological theorySeligson, Joel; Baumeister, Philip · ao/18/5/ao-18-5-742.pdf · 1979
Modeling of a focusing grating coupler using vector scattering theorySeligson, Joel · ao/27/4/ao-27-4-684.pdf · 1988
Absorber-induced features in the ac response of a He-Ne laserJoel Seligson; Rainer Salomaa; Stig Stenholm · 1976
SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Metrology, Inspection, and Process Control for Microlithography XIX - Overlay mark performance: a simulation studyFrommer, Aviv; Silver, Richard M.; Seligson, Joel L. · 2005
SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Metrology, Inspection, and Process Control for Microlithography XVIII - Target noise in overlay metrologySeligson, Joel L.; Silver, Richard M.; Adel, Mike E.; Izikson, Pavel; Levinski, Vladimir; Yaffe, Dan · 2004
SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - <title>Overlay metrology simulations: analytical and experimental validations</title>Seligson, Joel L.; Golovanevsky, Boris; Poplawski, Jorge M.; Adel, Michael E.; Silver, Richard M.; Herr, Daniel J. · 2003