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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (2004.01.25-2004.01.29)] 17th IEEE International Conference on Micro Electro Mechanical Systems Maastricht MEMS 2004 Technical Digest MEMSYS-04 - 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517)

[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (2004.01.25-2004.01.29)] 17th IEEE International Conference on Micro Electro Mechanical Systems Maastricht MEMS 2004 Technical Digest MEMSYS-04 - 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (IEEE Cat. No.04CH37517)

  • 文件大小18.06KB
  • 发表时间2004
  • DOI10.1109/mems.2004.1290492
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