SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MOEMS and Miniaturized Systems IV - Low-voltage 256-electrode membrane mirror system for adaptive optics
Kurczynski, Peter L.; El-Fatatry, Ayman; Dyson, Harold M.; Sadoulet, Bernard; Bower, J. E.; Lai, Warren Y.; Mansfield, William M.; Taylor, J. A.
- 作者Kurczynski, Peter L.; El-Fatatry, Ayman; Dyson, Harold M.; Sadoulet, Bernard; Bower, J. E.; Lai, Warren Y.; Mansfield, William M.; Taylor, J. A.
- 卷第5346卷
- 印刷ISSN0277-786X
- 文件大小159.41KB
- 发表时间2004
- DOI10.1117/12.524486