Spectroscopic studies of metal high-k dielectrics: transition metal oxides and silicates, and complex rare earth/transition metal oxides

• 作者G. Lucovsky; J. G. Hong; C. C. Fulton; Y. Zou; R. J. Nemanich; H. Ade; D. G. Scholm; J. L. Freeouf
• 卷第241卷
• 期第10期
• 印刷ISSN0370-1972
• 电子ISSN1521-3951
• 文件大小1546.47KB
• 发表时间2004
• DOI10.1002/pssb.200404938
• 页码2221-2235