SPIE Proceedings [SPIE 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dresden, Germany (Monday 12 January 2004)] 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Effect of electrostatic chucking on EUVL mask flatness
Mikkelson, Andrew R.; Engelstad, Roxann L.; Lovell, Edward G.; Aschke, Lutz; Rueggeberg, Frauke; Sobel, Frank
- 作者Mikkelson, Andrew R.; Engelstad, Roxann L.; Lovell, Edward G.; Aschke, Lutz; Rueggeberg, Frauke; Sobel, Frank
- 卷第5504卷
- 印刷ISSN0277-786X
- 文件大小743.81KB
- 发表时间2004
- DOI10.1117/12.568014