Mathematical topographical correction of XPS images using multivariate statistical methods
Kateryna Artyushkova; Julia E. Fulghum
- 作者Kateryna Artyushkova; Julia E. Fulghum
- 卷第36卷
- 期第9期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小544.04KB
- 发表时间2004
- DOI10.1002/sia.1841
- 页码1304-1313