SPIE Proceedings [SPIE 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dresden, Germany (Monday 12 January 2004)] 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - The guideline of reticle data management (Ver. 2)
Iriki, Nobuyuki; Miyazaki, Norihiko; Homma, M.; Sato, T.; Onodera, Toshio; Matsuda, T.; Uga, T.; Higashino, Hidehiro; Higashikawa, Iwao; Yoshioka, Nobuyuki
- 作者Iriki, Nobuyuki; Miyazaki, Norihiko; Homma, M.; Sato, T.; Onodera, Toshio; Matsuda, T.; Uga, T.; Higashino, Hidehiro; Higashikawa, Iwao; Yoshioka, Nobuyuki
- 卷第5504卷
- 印刷ISSN0277-786X
- 文件大小1240.40KB
- 发表时间2004
- DOI10.1117/12.568028