SPIE Proceedings [SPIE 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dresden, Germany (Monday 12 January 2004)] 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Determining the transfer function of a mask fabrication process
Leunissen, Peter L. H. A.; Philipsen, Vicky; Jonckheere, Rik M.
- 作者Leunissen, Peter L. H. A.; Philipsen, Vicky; Jonckheere, Rik M.
- 卷第5504卷
- 印刷ISSN0277-786X
- 文件大小730.33KB
- 发表时间2004
- DOI10.1117/12.568023