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The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

Maria Aboy; Lourdes Pelaz; Luis A. Marqués; Pedro López; Juan Barbolla; V.C. Venezia; R. Duffy; Peter B. Griffin

作者Maria Aboy; Lourdes Pelaz; Luis A. Marqués; Pedro López; Juan Barbolla; V.C. Venezia; R. Duffy; Peter B. Griffin
印刷ISSN0921-5107
文件大小107.85KB
发表时间2004
DOI10.1016/j.mseb.2004.07.056
页码193-197