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The effect of erbium and oxygen on the photoluminescence intensity of erbium and the composition ofa-SiOx:(H, Er, O) films deposited by DC magnetron sputtering

The effect of erbium and oxygen on the photoluminescence intensity of erbium and the composition ofa-SiOx:(H, Er, O) films deposited by DC magnetron sputtering

Yu. K. Undalov; E. I. Terukov; O. B. Gusev; V. Kh. Kudoyarova
  • 作者Yu. K. Undalov; E. I. Terukov; O. B. Gusev; V. Kh. Kudoyarova
  • 卷第39卷
  • 期第8期
  • 印刷ISSN1063-7826
  • 电子ISSN1090-6479
  • 文件大小112.08KB
  • 发表时间2005-08
  • DOI10.1134/1.2010690
  • 页码944-950
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