![[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting]()
[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvestingAktakka, Ethem Erkan; Peterson, Rebecca L.; Najafi, Khalil · 2011