PFC Recycling System by Continuous Gas Chromatography
Tajima, Y.; Futatsuki, T.; Abe, T.; Tanzawa, S.
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Tajima, Y.; Futatsuki, T.; Abe, T.; Tanzawa, S.
- 卷第18卷
- 期第4期
- 印刷ISSN0894-6507
- 文件大小1100.08KB
- 发表时间2005-11
- DOI10.1109/TSM.2005.858468
- 页码495-500