[IEEE EuroSimE 2005. 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Berlin, Germany (April 18-20, 2005)] EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Cu bonding to co lowK wafers: a systematic study of the mechanical bonding process
Degryse, D.; Vandevelde, B.; Beyne, E.
- 作者Degryse, D.; Vandevelde, B.; Beyne, E.
- 文件大小1232.92KB
- 发表时间2005
- DOI10.1109/esime.2005.1502769
- 页码41-48