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[IEEE Proceedings of the 2005, American Control Conference, 2005. - Portland, OR, USA (June 8-10, 2005)] Proceedings of the 2005, American Control Conference, 2005. - A novel sensing scheme for the displacement of electrostatically actuated microcantilevers

[IEEE Proceedings of the 2005, American Control Conference, 2005. - Portland, OR, USA (June 8-10, 2005)] Proceedings of the 2005, American Control Conference, 2005. - A novel sensing scheme for the displacement of electrostatically actuated microcantilevers

Napoli, M.; Olroyd, C.; Bamieh, B.; Turner, K.

作者Napoli, M.; Olroyd, C.; Bamieh, B.; Turner, K.
文件大小551.24KB
发表时间2005
DOI10.1109/acc.2005.1470338
页码2475-2480

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