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Silicides as contact material for DRAM applications

Silicides as contact material for DRAM applications

C. Fitz; M. Goldbach; A. Dupont; S. Schmidbauer

作者C. Fitz; M. Goldbach; A. Dupont; S. Schmidbauer
卷第82卷
印刷ISSN0167-9317
文件大小313.57KB
发表时间2005
DOI10.1016/j.mee.2005.07.043
页码460-466

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