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Modeling of amorphous pocket formation in silicon by numerical solution of the heat transport equation

Modeling of amorphous pocket formation in silicon by numerical solution of the heat transport equation

D. Kovač; G. Otto; G. Hobler

作者D. Kovač; G. Otto; G. Hobler
卷第228卷
印刷ISSN0168-583X
文件大小259.22KB
发表时间2005
DOI10.1016/j.nimb.2004.10.048
页码226-229

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