Relation between interfacial structure and mechanical properties in AlN/TiN bilayers investigated by EXAFS

• 作者O. Ersen; M.-H. Tuilier; A. Thobor-Keck; C. Rousselot; R. Cortès
• 卷第234卷
• 期第3期
• 印刷ISSN0168-583X
• 文件大小464.26KB
• 发表时间2005
• DOI10.1016/j.nimb.2005.02.004
• 页码308-320