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[IEEE CAS 2005 2005 International Semiconductor Conference, 2005. - Sinaia, Romania (Oct. 3-5, 2005)] CAS 2005 Proceedings. 2005 International Semiconductor Conference, 2005. - Ellipsometric study of SiN/sub x//nc-Si/SiN/sub x/ multilayers

[IEEE CAS 2005 2005 International Semiconductor Conference, 2005. - Sinaia, Romania (Oct. 3-5, 2005)] CAS 2005 Proceedings. 2005 International Semiconductor Conference, 2005. - Ellipsometric study of SiN/sub x//nc-Si/SiN/sub x/ multilayers

Basa, P.; Petrik, P.

作者Basa, P.; Petrik, P.
卷第2卷
文件大小799.14KB
发表时间2005
DOI10.1109/smicnd.2005.1558815
页码417-420

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