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Gas-Phase Kinetic Modeling of the AlCl[sub 3] Decomposition in the AlCl[sub 3]-CO[sub 2]-H[sub 2]-HCl System for a Hot-Wall CVD Reactor

Gas-Phase Kinetic Modeling of the AlCl[sub 3] Decomposition in the AlCl[sub 3]-CO[sub 2]-H[sub 2]-HCl System for a Hot-Wall CVD Reactor

Tan, Pengfu; Müller, Jürgen; Neuschütz, Dieter

期刊名称Journal of The Electrochemical Society
作者Tan, Pengfu; Müller, Jürgen; Neuschütz, Dieter
卷第152卷
期第5期
印刷ISSN0013-4651
文件大小139.39KB
发表时间2005
DOI10.1149/1.1883236

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