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Crystallization of hydrogenated amorphous silicon–carbon films by means of laser treatments

Crystallization of hydrogenated amorphous silicon–carbon films by means of laser treatments

G. Ambrosone; U. Coscia; S. Lettieri; P. Maddalena; C. Minarini; V. Parisi; S. Schutzmann
  • 作者G. Ambrosone; U. Coscia; S. Lettieri; P. Maddalena; C. Minarini; V. Parisi; S. Schutzmann
  • 卷第247卷
  • 印刷ISSN0169-4332
  • 文件大小271.34KB
  • 发表时间2005
  • DOI10.1016/j.apsusc.2005.01.051
  • 页码471-476
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