Sheath Structures of Strongly Electronegative Plasmas
Ping, Duan; Zhengxiong, Wang; Wenchun, Wang; Jinyuan, Liu; Yue, Liu; Xiaogang, Wang
- 期刊名称Plasma Science and Technology
- 作者Ping, Duan; Zhengxiong, Wang; Wenchun, Wang; Jinyuan, Liu; Yue, Liu; Xiaogang, Wang
- 卷第7卷
- 期第1期
- 印刷ISSN1009-0630
- 文件大小375.25KB
- 发表时间2005-02
- DOI10.1088/1009-0630/7/1/011
- 页码2649-2652