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Investigation of methods for doping CZ silicon with gallium

Investigation of methods for doping CZ silicon with gallium

Takeshi Hoshikawa; Toshinori Taishi; Shuji Oishi; Keigo Hoshikawa

作者Takeshi Hoshikawa; Toshinori Taishi; Shuji Oishi; Keigo Hoshikawa
卷第275卷
印刷ISSN0022-0248
文件大小198.04KB
发表时间2005
DOI10.1016/j.jcrysgro.2004.11.286

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