Electrical Properties of Ultrathin Al2O3 Films Grown by Metalorganic Chemical Vapor Deposition for Advanced Complementary Metal-oxide Semiconductor Gate Dielectric Applications
Skordas, Spyridon; Papadatos, Filippos; Consiglio, Steven; Eisenbraun, Eric T.; Kaloyeros, Alain E.; Gusev, Evgeni P.
- 期刊名称Journal of Materials Research
- 作者Skordas, Spyridon; Papadatos, Filippos; Consiglio, Steven; Eisenbraun, Eric T.; Kaloyeros, Alain E.; Gusev, Evgeni P.
- 卷第20卷
- 期第6期
- 印刷ISSN0884-2914
- 电子ISSN2044-5326
- 文件大小193.92KB
- 发表时间2005-6
- DOI10.1557/JMR.2005.0196
- 页码1536-1543