Dry release fabrication and testing of SiC electrostatic cantilever actuators

Liudi Jiang; M. Hassan; R. Cheung; A.J. Harris; J.S. Burdess; C.A. Zorman; M. Mehregany

作者Liudi Jiang; M. Hassan; R. Cheung; A.J. Harris; J.S. Burdess; C.A. Zorman; M. Mehregany
印刷ISSN0167-9317
文件大小192.15KB
发表时间2005
DOI10.1016/j.mee.2004.12.015
页码106-111

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